We propose all-dielectric metasurfaces that can be actively re-configured using the phase-change material Ge 2 Sb 2 Te 5 (GST) alloy. With selectively controlled phase transitions on the composing GST elements, metasurfaces can be tailored to exhibit varied functionalities. Using phase-change GST rod as the basic building block, we have modelled metamolecules with tunable optical response when phase change occurs on select constituent GST rods. Tunable gradient metasurfaces can be realized with variable supercell period consisting of different patterns of the GST rods in their amorphous and crystalline states. Simulation results indicate a range of functions can be delivered, including multilevel signal modulating, near-field coupling of GST rods, and anomalous reflection angle controlling. This work opens up a new space in exploring active meta-devices with broader applications that cannot be achieved in their passive counterparts with permanent properties once fabricated.

An ultrathin planar cavity metasurface is proposed based on ultrathin film interference and its practicability for light manipulation in visible region is experimentally demonstrated. Phase of reflected light is modulated by finely adjusting the thickness of amorphous silicon (a-Si) by a few nanometers on an aluminum (Al) substrate via nontrivial phase shifts at the interfaces and interference of multireflections generated from the planar cavity. A phase shift of π, the basic requirement for two-level phase metasurface systems, can be accomplished with an 8 nm thick difference. For proof of concept, gradient metasurfaces for beam deflection, Fresnel zone plate metalens for light focusing, and metaholograms for image reconstruction are presented, demonstrating polarization-independent and broadband characteristics. This novel mechanism for phase modulation with ultrathin planar cavity provides diverse routes to construct advanced flat optical devices with versatile applications.

The material and exact shape of a nanostructure determine its optical response, which is especially strong for plasmonic metals. Unfortunately, only a very few plasmonic metals are available, which limits the spectral range where these strong optical effects can be utilized.Alloying different plasmonic metals can overcome this limitation, at the expense of using a high temperature alloying process, which adversely destroys the nanostructure shape. Here, we develop a low temperature alloying process at only 300°C and fabricate Au-Ag nanostructures with a broad diversity of shapes, aspect ratios and stoichiometries. EDX and XPS analyses confirm the homogeneous alloying through the entire sample. Varying the alloy stoichiometry tunes the optical response of the nanostructure and controls spectral features such as Fano resonances. Binary metasurfaces that combine nanostructures with different stoichiometries are fabricated using multiple-step electron beam lithography, and their optical function as hologram or Fresnel zone plate is demonstrated at the visible wavelength of  = 532 nm. This low temperature annealing technique provides a versatile and cost-effective way of fabricating complex Au-Ag nanostructures with arbitrary stoichiometry.