An innovative fabrication method to produce a macroporous Si surface by employing an anodic aluminium oxide (AAO) nanopore array layer as an etching template is presented. Combining AAO with a reactive ion etching (RIE) processes, a homogeneous and macroporous silicon surface can be effectively configured by modulating AAO process parameters and alumina film thickness, thus hopefully replacing conventional photolithography and electrochemical etch methods. The hybrid process integration is considered fully CMOS compatible thanks to the low-temperature AAO and CMOS processes. The gas-sensing characteristics of 50 nm TiO2 nanofilms deposited on the macroporous surface are compared with those of conventional plain (or non-porous) nanofilms to verify reduced response noise and improved sensitivity as a result of their macroporosity. Our experimental results reveal that macroporous geometry of the TiO2 chemoresistive gas sensor demonstrates 2-fold higher (∼33%) improved sensitivity than a non-porous sensor at different levels of oxygen exposure. In addition, the macroporous device exhibits excellent discrimination capability and significantly lessened response noise at 500 °C. Experimental results indicate that the hybrid process of such miniature and macroporous devices are compatible as well as applicable to integrated next generation bio-chemical sensors.

The self-similar solutions are obtained for isothermal expansions of neutral plasmas into a vacuum. The classic solution given by Mora [Phys. Fluids 22, 12 (1979)] corresponds to a special case of our solution. Some special solutions have been pointed out by Gurevich et al. [Phys. Rev. Lett. 42, 769 (1979)] and observed by a lot of experiments. The formulation of ion velocity with respect to the acceleration time is proposed for the general solution, and the numerical result can be obtained easily. The electric field and ion velocity at the ion front have been achieved.

Both foil structure and surface texturing have been widely used to improve bearing performance. However, there is little research on their combination, namely, textured gas foil bearing. This paper adopts the Reynolds equation as the pressure governing equation of bump-type foil journal bearing to study the influence of textures located on the top foil. The Newton-Raphson iterative method and the perturbation method are employed to obtain static and dynamic characteristics, respectively. Thereafter, based on three texture distribution types, further analysis about the effect of the relative texture depth and the textured portion is carried out. The results indicate that an appropriate arrangement of textures could improve the performance of gas foil bearing. For #1 texture distribution, the maximum increment of load capacity could exceed 10% when ω  =  1.4 × 105 r/min, ε  =  0.2.

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