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IntroductionIn the past decade amorphous metaloxide thin-fi lm transistors (TFTs) have been studied in depth for applications in active-matrix organic light-emitting diodes (AMOLEDs), solar cells, biosensor arrays, and photodetectors. [ 1 ] Along with the rapid developments in display technology, highresolution and high-speed displays have become one of the growing trends. In this regard, energy consumption has turned out to be an inevitable issue especially for mobile, battery-powered applications. As a low-voltage operation of the oxide TFTs is demanded for practical applications, it is necessary to develop novel gate dielectrics for producing a large areal capacitance. [ 2 ] The achievements of low-voltage oxide TFTs have been extensively reported in recent works, including the use of inorganic high-k dielectrics, [ 3 ] organic self-assembled-monolayer dielectrics, [ 4 ] and electrolyte dielectrics. [ 5 ] Among these, the use of inorganic high-k dielectrics is the most attractive option as it simultaneously enables a low leakage current, through the use of a thicker fi lm, as well as a low-voltage operation. The high-k dielectrics can be prepared by various methods such as metal anodic oxidation method, [ 6 ] vacuum-based deposition, [ 7 ] and low-cost solution-based techniques. [ 8 ] [ 12 ] silicates, [ 13 ] etc.) that could potentially replace conventional dielectrics, such as SiO 2 and SiN x . To the best of our knowledge, there are few reports on the demonstration of scandium oxide (Sc 2 O 3 ) as the gate dielectric in TFT devices.As a high-k material Sc 2 O 3 has a dielectric constant of 14, a bandgap of 6.3 eV and an excellent thermal stability with Si. [ 14 ] In addition, Sc 2 O 3 has been found to possess a negative fi xed charge. This is benefi cial to obtain a positive threshold or turnon voltage for n-type TFTs that operate in the enhancement mode. [ 15 ] Concerning the CMOS architecture development based on solution processing, a wet step is inevitably involved. In this regard, the resistance to moisture absorption is another important , a large current ratio ( I on / I off ) of 2.7 × 10 7 and high stability. Moreover, as far as we know it is the fi rst time that solution-processed p-type oxide TFTs based on a high-k dielectric are achieved. The as-fabricated p-type CuO/ScO x TFTs exhibit a large I on / I off of around 10 5 and a hole mobility of 0.8 cm 2 V −1 at an operating voltage of 3 V. To the best of our knowledge, these electrical parameters are among the highest performances for solution-processed p-type TFTs, which represents a great step towards the achievement of low-cost, all-oxide, and low-power consumption CMOS logics.