Molybdenum bis(imido) bis(thiolato) complexes of the type Mo(N t Bu) 2 (SR) 2 (R = t Bu (1), i Pr (2)) were synthesized and evaluated as precursors for the aerosol-assisted chemical vapor deposition (AACVD) of nitrogen-doped molybdenum disulfide. Decomposition of the precursors was examined using mass spectrometry and thermolysis experiments, and the predominant pathways were those that involved proton transfer from a methyl group on a thiolato ligand. Thermal behavior, volatility, and enthalpies of sublimation were analyzed using TGA. Comparative studies of the nitrogen-doped MoS 2 (N-MoS 2 ) grown from Mo(N t Bu) 2 (S t Bu) 2 to that of pristine MoS 2 grown from Mo(S t Bu) 4 were carried out. The material was characterized as MoS 2 with nitrogen doping by the presence of the 2H-MoS 2 1 E 2g and A 1g Raman vibrational modes. The GIXRD diffraction patterns of the N-MoS 2 samples were indexed to 2H-MoS 2 , and evidence of nitrogen doping was confirmed with the presence of Mo−N bonding by XPS and with EDS mapping. The N-MoS 2 deposits displayed a nanosphere morphology which contrasted with vertical nanosheets for undoped MoS 2 .

Tetrakis(dithiocarboxylato)molybdenum(IV) complexes of the type Mo(S2CR)4 (R = Me, Et, iPr, Ph) were synthesized, characterized and prescreened as precursors for aerosol assisted chemical vapor deposition (AACVD) of MoS2 thin films....

Aerosol-assisted chemical vapor deposition of MoS 2 from solutions containing the single-source precursors cis-Mo-(CO) 4 (TMTU) 2 and Mo(CO) 5 (TMTU) in toluene was compared to depositions from the coreactant solution containing Mo(CO) 6 and uncoordinated TMTU in toluene. The results were used to assess the significance of ligand precoordination on the properties of the deposited films. Raman spectra and GI-XRD patterns of the films show that the single-source precursors produced more intense and sharper signals for 2H-MoS 2 as compared to the coreactant system of Mo(CO) 6 and TMTU, which is indicative of improved crystallinity. SEM and XPS were also used to assess morphology and film composition. Thermolysis of cis-Mo(CO) 4 (TMTU) 2 and analysis of the pyrolysis products by GC−MS and 1 H NMR suggested a decomposition mechanism of the TMTU ligand where a terminal sulfido is generated on the molybdenum center with loss of a heteroatom stabilized carbene.