The use of NF3 is significantly increasing every year. However, NF3 is a greenhouse gas with a very high global warming potential. Therefore, the development of a material to replace NF3 is required. F3NO is considered a potential replacement to NF3. In this study, the characteristics and cleaning performance of the F3NO plasma to replace the greenhouse gas NF3 were examined. Etching of SiO2 thin films was performed, the DC offset of the plasma of both gases (i.e., NF3 and F3NO) was analyzed, and a residual gas analysis was performed. Based on the analysis results, the characteristics of the F3NO plasma were studied, and the SiO2 etch rates of the NF3 and F3NO plasmas were compared. The results show that the etch rates of the two gases have a difference of 95% on average, and therefore, the cleaning performance of the F3NO plasma was demonstrated, and the potential benefit of replacing NF3 with F3NO was confirmed.

Upon reentering the Earth’s atmosphere from space, a reentry vehicle becomes enshrouded in an ionization layer. This layer is known as the reentry plasma sheath and is caused by aerodynamic heating. Owing to the oscillation of charged particles in the reentry plasma sheath, the electromagnetic waves for communication between the vehicle and ground are attenuated. Analysis of the plasma density and attenuation of electromagnetic waves in a reentry plasma environment would require experimentation in an environment in which an actual aircraft reenters the atmosphere. Alternatively, an experiment in a large-scale plasma wind tunnel would be necessary. Unfortunately, these experiments would be extremely costly. Therefore, in this study, the reentry plasma was reproduced at laboratory scale using the hot refractory anode vacuum arc (HRAVA) method. In addition, the pressure in the vacuum chamber was used as a variable to probe the characteristics of the reentry plasma according to the altitude. The plasma density and attenuation of electromagnetic waves propagating through the plasma medium were measured using heterodyne interferometry and reflectometry capable of frequency analysis in the range of 10-35 GHz. The results confirmed that the plasma density and attenuation of the electromagnetic waves increased as the pressure in the vacuum chamber increased.