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A new algorithm for the simulation of photoresist etching. based on cellular automata. is presented in this paper. The atgorithm is fast and robust and ha, been successfully tested using all known etch-rate distribution test functions. The algonthm performs very well, even in areas where the Ructuatioo in etch rates is wide and sharp.

SUMMARYIn this paper a novel design of a quantum-dot cellular automata (QCA) 2 to 1 multiplexer is presented. The QCA circuit is simulated and its operation is analyzed. A modular design and simulation methodology is developed, which can be used to design 2 n to 1 QCA multiplexers using the 2 to 1 QCA multiplexer as a building block. The design methodology is formulated in order to increase the circuit stability.

In this paper the electrical tree growth in solid insulating materials containing voids of arbitrary shape is modelled using von Neumann's cellular automata (CA). The model is based upon the assumption that the electric stress at the end of a conducting tip quite often approaches the dielectric strength of the material and that progressive breakdown may occur by electrical tree formation. Because of tree advancement, the potential distribution within the insulating material changes with time, and it is calculated at each time step. An algorithm, based on this model, for the simulation of electrical tree growth in solid dielectrics containing voids of arbitrary shape has been developed. Simulation results show that voids constitute a danger for solid insulation, because they act as sources of secondary electrical trees. An interaction mechanism between voids within a dielectric is proposed and discussed.