The terahertz (THz) band has very attractive characteristics for sensing and biosensing applications, due to some interesting features such as being a non‐ionizing radiation, very sensitive to weak interactions, thus, complementing typical spectroscopy systems in the infrared. However, a fundamental drawback is its relatively long wavelength (10–1000 µm) which makes it blind to small features, hindering seriously both thin‐film and biological sensing. Recently, new ways to overcome this limitation have become possible thanks to the advent of metasurfaces. These artificial structures are planar screens usually made of periodic metallic resonators and whose electromagnetic response can be controlled at will by design. This design freedom allows metasurfaces to surpass the restrictions of classical THz spectroscopy, by creating fine details comparable to the size of the thin films or microorganisms under test. The strong field concentration near these small metasurface details at resonance makes them highly sensitive to tiny variations in the nearby environment, allowing for an enhanced detection more accurate than classical THz spectroscopy. The main advances in THz metasurface sensors from a historical as well as application‐oriented perspective are summarized. The focus is put mainly on thin‐film and biological sensors, with an aim to cover the most recent advances in the topic.

Subwavelength hole array (HA) metasurfaces support the so-called extraordinary optical transmission (EOT) resonance that has already been exploited for sensing. In this work, we demonstrate the superior performance of a different resonant regime of HA metasurfaces called anomalous EOT, by doing a thorough numerical and experimental study of its ability in thin-film label-free sensing applications in the terahertz (THz) band. A comprehensive analysis using both the regular and anomalous EOT resonances is done by depositing thin layers of dielectric analyte slabs of different thicknesses on the structures in different scenarios. We carry out a detailed comparison and demonstrate that the best sensing performance is achieved when the structure operates in the anomalous EOT resonance and the analyte is deposited on the non-patterned side of the metasurface, improving by a factor between 2 and 3 the results of the EOT resonance in any of the considered scenarios. This can be explained by the comparatively narrower linewidth of the anomalous EOT resonance. The results presented expand the reach of subwavelength HAs for sensing applications by considering the anomalous EOT regime that is usually overlooked in the literature.

In this work, a labyrinth metasurface sensor operating at the low-frequency edge of the THz band is presented. Its intricate shape leads to a high electric field confinement on the surface of the structure, resulting in ultrasensitive performance, able to detect samples of the order of tens of nanometers at a wavelength of the order of millimeters (i.e., five orders of magnitude larger). The sensing capabilities of the labyrinth metasurface are evaluated numerically and experimentally by covering the metallic face with tin dioxide (SnO 2 ) thin films with thicknesses ranging from 24 to 345 nm. A redshift of the resonant frequency is observed as the analyte thickness increases, until reaching a thickness of 20 μm, where the response saturates. A maximum sensitivity of more than 800 and a figure of merit near 4500 nm À1 are achieved, allowing discriminating differences in the SnO 2 thickness of less than 25 nm, and improving previous works by a factor of 35. This result can open a new paradigm of ultrasensitive devices based on intricate metageometries overcoming the limitations of classical metasurface sensor designs based on periodic metaatoms.The THz band (ranging from 0.1 to 10 THz) has been historically known as the "THz gap" [1] due to the lack of efficient emitters and receivers operating in this regime at ambient temperature. However, a series of recent breakthroughs have helped to bridge this gap, to the point that nowadays it is a field of intense and multidisciplinary research with many applications coming into reality in numerous sectors, like medicine, security, communications, space, or sensing, among others. [2] Sensing at THz is of special relevance, because many substances exhibit molecular vibrations opening new routes for high performance detection platforms, allowing the identification of certain gases or solids that show absorption lines in this frequency range. Moreover, due to a larger wavelength and deeper penetration into many materials versus the visible or infrared ranges, THz waves are promising for examining optically opaque coatings. To date, several strategies have been followed to develop THz sensing devices such as plasmonic structures, [3] metamaterials, [4] and frequency selective surfaces, [5] among others.