The performance of optical devices relying in vanadium dioxide (VO) technology compatible with the silicon platform depends on the polarization of light and VO properties. In this work, optical switching in hybrid VO/Si waveguides thermally triggered by lateral microheaters is achieved with insertion losses below 1 dB and extinction ratios above 20 dB in a broad bandwidth larger than 30 nm. The optical switching response has been optimized for TE and TM polarizations by using a homogeneous and a granular VO layer, respectively, with a small impact on the electrical power consumption. The stability and reversibility between switching states showing the possibility of bistable performance is also demonstrated.
Nonvolatile switching is still a missing functionality in current mainstream silicon photonics complementary metal‐oxide‐semiconductor platforms. Fundamentally, nonvolatile switching stands for the ability to switch between two or more photonic states reversibly without needing additional energy to hold each state. Therefore, such a feature may push one step further the potential of silicon photonics by offering new ways of achieving photonic reconfigurability with ultrasmall energy consumption. Here, a detailed review of current developments that enable nonvolatile switching in silicon photonic waveguide devices is provided. Nonvolatility is successfully demonstrated either based on device engineering or by hybrid integration of silicon waveguides with materials exhibiting unique optical properties. Furthermore, several approaches with high potential for evolving toward a nonvolatile behavior with enhanced performance are also being explored. In most cases, many development steps are still necessary to ensure reliable devices. However, this research field is expected to progress in the coming years boosted by current and emerging applications benefiting from such functionality, such as new paradigms for photonic computing or advanced reconfigurable circuits for programmable photonic systems.
A tunable transverse electric (TE) pass polarizer is demonstrated based on hybrid vanadium dioxide/silicon (VO/Si) technology. The 20-μm-long TE pass polarizer exploits the phase transition of the active VO material to control the rejection of the unwanted transverse magnetic (TM) polarization. The device features insertion losses below 1 dB at static conditions and insertion losses of 5.5 dB and an attenuation of TM polarization of 19 dB in the active state for a wavelength range between 1540 nm and 1570 nm. To the best of our knowledge, this is the first time that tunable polarizers compatible with Si photonics are demonstrated.
The performance of strained silicon devices based on the deposition of a top silicon nitride layer with high stress have been thoroughly analyzed by means of simulations and experimental results. Results clearly indicate that the electro-optic static response is basically governed by carrier effects. A first evidence is the appearance of a variable optical absorption with the applied voltage that should not occur in case of having a purely electro-optic Pockels effect. However, hysteresis and saturation effects are also observed. We demonstrate that such effects are mainly due to the carrier trapping dynamics at the interface between the silicon and the silicon nitride and their influence on the silicon nitride charge. This theory is further confirmed by analyzing identical devices but with the silicon nitride cladding layer optimized to have intrinsic stresses of opposite sign and magnitude. The latter is achieved by a post annealing process which produces a defect healing and consequently a reduction of the silicon nitride charge. Raman measurements are also carried out to confirm the obtained results.
The lack of memory effect of silicon makes it unfeasible to store electronic data in photonics. Here, we propose a non-volatile readout photonic memory, which is electronically written/erased and optically read. The memory utilizes indium tin oxide (ITO) as a floating gate and exploits its epsilon-near-zero (ENZ) regime and electro-optic activity. Extinction ratios greater than 10 dB in a bandwidth of 100 nm for a 5-µm-long memory are obtained. Furthermore, power consumption in the order of µW with retention times of about years have been predicted. The proposed structure opens a pathway for developing highly integrated electro-optic devices such as memory banks.
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