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A spectral-splitting, triple-junction a-Si alloy solar cell processor has been designed, built and optimized. A rollto-roll process has been used to deposit two layers of back reflector, a triple-cell structure with nine layers of a-Si and a-SiGe alloys and a single layer of antireflection coating consecutively on a half-a-mile roll of stainless steel. The coated web is next slabbed and processed to make a variety of products. The design of the machine and processes used incorporate several key features developed for improving cell efficiency. In order to reduce manufacturing cost, higher deposition rates and thinner cells than are used in R&D have been used. The back reflector also consists of AI/ZnO rather than AgQnO.Large-scale production has begun, and products are being shipped for a wide range of applications.

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