No abstract

Müller, G.; Cillessen, J.F.M.; Giesbers, J.B.; Weening, R.P.; Wolf, R.M.

Thin-film ferroelectric capacitors consisting of PbZr 0.53 Ti 0.47 O 3 sandwiched between La 0.5 Sr 0.5 CoO 3 electrodes have been deposited using pulsed laser deposition. The combination of oxidic perovskite-type materials results in capacitors with a coercive field (E c ) which is comparable with values for bulk ceramics. Textured thin-film capacitors with a columnar microstructure show lower switching voltages than epitaxial films. No thickness dependence of E c and a good endurance up to 10 11 cycles have been observed for epitaxial as well as textured capacitors with oxidic electrodes. In contrast, capacitors with a metallic top electrode show an increase of E c with decreasing thickness of the ferroelectric layer. We show that charge injection can explain the experimentally observed increase of E c with decreasing ferroelectric layer thickness. An overview is given of the growth conditions needed for PbZr 0.53 Ti 0.47 O 3 films, because the precise stoichiometry is of the utmost importance for the capacitor quality.