A simple and quick method of durable samples preparation by the thin layer method through direct digesting of the analysed material on the substrate has been presented. Four-and three-component mono-and polycrystals have been analysed. Standards have been used in calibration containing: Cr, Co, Ni, Cu, Zn, Ga, Se, Sb, Yb. To improve the correlation between the concentration and the¯uorescent radiation models of mathematical corrections have additionally been used: multiple linear regression, Lucas-ToothPyne model (L. T. P.) and de Jongh model (d. J.).Statistical parameters: detection limits for 0.5 mg samples: Cr±0.041%, Co±0.034%, Ni±0.042%, Cu± 0.053%, Zn±0.054%, Ga±0.057%, Se±0.057%, Sb± 0.113%, Yb±0.077%. Correlation coef®cients: simple regression 0.9946±0.9997, multiple regression 0.9974±1.0000, L. T. P. 0.9993±1.0000, d. J. 0.9995± 1.0000.
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