Articles you may be interested inModeling of inductively coupled plasma SF6/O2/Ar plasma discharge: Effect of O2 on the plasma kinetic properties J. Vac. Sci. Technol. A 32, 021303 (2014); 10.1116/1.4853675 Transition of electron kinetics in weakly magnetized inductively coupled plasmas Phys. Plasmas 20, 101612 (2013); 10.1063/1.4826949 Modeling of inductively coupled plasma Ar/Cl2/N2 plasma discharge: Effect of N2 on the plasma properties J. Vac. Sci. Technol. A 31, 011301 (2013); 10.1116/1.4766681 Nonlocal collisionless power absorption using effective viscosity model in inductively coupled plasma discharges Phys. Plasmas 16, 073505 (2009);An effective viscosity model for warm magnetized inductively coupled plasma ͑MICP͒ discharges has been derived. It calculates the power absorbed inside MICP discharges that takes nonlocal behavior into account with the help of effective viscosity terms in the momentum equations for right-handed and left-handed components of the wave. The validity of this model for warm MICP discharges has been checked by comparing it with self-consistent kinetic model for warm MICP discharges. This effective viscosity model shows nonmonotonic decay for right-and left-handed components of the electric field inside MICP discharges. It also shows regions of negative power absorption which cannot be shown using conventional fluid models. The power absorbed per unit area ͑for right-and left-handed components͒ calculated using effective viscosity model is similar to that calculated using computationally extensive kinetic models over a wide range of MICP discharge conditions.

Effective viscosity model for inductively coupled plasma (ICP) discharges has been used to calculate the power absorbed inside ICP discharges. It is found that it can be used to calculate collisionless heating, which is a warm plasma effect. The validity of effective viscosity model has been checked by comparing it with kinetic model for warm ICP discharges. For very small plasma lengths, the results of both models are the same. At intermediate lengths where bounce resonance heating is important, results of the two models are not the same. Bounce resonance length given by effective viscosity model does not match very well with that given by the kinetic model. It shows that bounce resonance heating cannot be taken care of accurately using the effective viscosity model. For large plasma length, when driving frequencies are low, power absorbed calculated using the kinetic model is more than that calculated by the effective viscosity model. For high driving frequencies, power absorbed calculated using the kinetic model is less than that calculated by the effective viscosity model. The best match between the results of two models (for large plasma length) is obtained if the combination of plasma density, electron temperature, driving frequency, and speed of light is such that the relation K=ωpvth/ωc≃1 holds. It is concluded that computationally less extensive effective viscosity model can be used to estimate power absorption in ICP discharges by calibrating it with the help of computationally intensive kinetic model. Once calibration is done a lot of computational effort can be avoided by using effective viscosity model instead of kinetic model.