Based on a proven low temperature scanning tunneling microscope (STM) platform, we have integrated a QPlus sensor, which employs a quartz tuning fork for force detection in non-contact atomic force microscopy (AFM). For combined STM operation, this sensor has key advantages over conventional sensors. For quantitative force spectroscopy on insulating thin films or semiconductors, decoupling of the tunneling current and the piezo-electrically induced AFM signal is important. In addition, extremely low signals require the first amplification stage to be very close to the sensor, i.e. to be compatible with low temperatures. We present atomic resolution imaging on single-crystal NaCl(100) with oscillation amplitudes below 100 pm (peak-to-peak) and operation at higher flexural modes in constant frequency shift (df) imaging feedback. We also present atomic resolution measurements on MgO(100) and Au(111), and first evaluation measurements of the QPlus sensor in Kelvin probe microscopy on Si(111) 7 x 7.

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A major challenge in the development of novel devices in nano and molecular electronics is their interconnection with larger-scale electrical circuits required to control and characterize their functional properties. Local electrical probing by multiple probes with ultimate scanning tunneling microscopy (STM) precision can significantly improve efficiency in analyzing individual nano-electronic devices without the need for full electrical integration.