Mg-doped AlN epilayers were grown by metalorganic chemical vapor deposition on sapphire substrates. Deep UV picosecond time-resolved photoluminescence ͑PL͒ spectroscopy has been employed to study the optical transitions in Mg-doped AlN epilayers. From PL emission spectra and the temperature dependence of the PL emission intensity, a binding energy of 0.51 eV for Mg acceptor in AlN was determined. Together with previous experimental results, the Mg acceptor activation energy in Al x Ga 1Ϫx N as a function of the Al content (x) was extrapolated for the entire AlN composition range. The average hole effective mass in AlN was also deduced to be about 2.7 m 0 from the experimental value of the Mg binding energy together with the use of the effective mass theory.
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