A microcantilever is a suspended micro-scale beam structure supported at one end which can bend and/or vibrate when subjected to a load. Microcantilevers are one of the most fundamental miniaturized devices used in microelectromechanical systems and are ubiquitous in sensing, imaging, time reference, and biological/biomedical applications. They are typically built using micro and nanofabrication techniques derived from the microelectronics industry and can involve microelectronics-related materials, polymeric materials, and biological materials. This work presents a comprehensive review of the rich dynamical response of a microcantilever and how it has been used for measuring the mass and rheological properties of Newtonian/non-Newtonian fluids in real time, in ever-decreasing space and time scales, and with unprecedented resolution.

Microcantilevers are increasingly being used to create sensitive sensors for rheology and mass sensing at the micro- and nano-scale. When operating in viscous liquids, the low quality factor of such resonant structures, translating to poor signal-to-noise ratio, is often manipulated by exploiting feedback strategies. However, the presence of feedback introduces poorly-understood dynamical behaviours that may severely degrade the sensor performance and reliability. In this paper, the dynamical behaviour of self-excited microcantilevers vibrating in viscous fluids is characterized experimentally and two complementary modelling approaches are proposed to explain and predict the behaviour of the closed-loop system. In particular, the delay introduced in the feedback loop is shown to cause surprising non-linear phenomena consisting of shifts and sudden-jumps of the oscillation frequency. The proposed dynamical models also suggest strategies for controlling such undesired phenomena.

Emerging applications such as the Internet-of-Things and more-electric aircraft require electronics with integrated data storage that can operate in extreme temperatures with high energy efficiency. As transistor leakage current increases with temperature, nanoelectromechanical relays have emerged as a promising alternative. However, a reliable and scalable non-volatile relay that retains its state when powered off has not been demonstrated. Part of the challenge is electromechanical pull-in instability, causing the beam to snap in after traversing a section of the airgap. Here we demonstrate an electrostatically actuated nanoelectromechanical relay that eliminates electromechanical pull-in instability without restricting the dynamic range of motion. It has several advantages over conventional electrostatic relays, including low actuation voltages without extreme reduction in critical dimensions and near constant actuation airgap while the device moves, for improved electrostatic control. With this nanoelectromechanical relay we demonstrate the first hightemperature non-volatile relay operation, with over 40 non-volatile cycles at 200 ∘ C.

A viscosity sensor based on the nonlinear behaviour of a microcantilever embedded in a self-excitation loop with an adjustable phase-shifter is proposed. The self-sustained oscillation frequencies of the cantilever are experimentally and theoretically investigated as functions of the fluid viscosity and of the imposed phase shift of the signal along the self-excitation loop. The sensor performance is validated experimentally using different water-glycerol solutions. In contrast to existing rheological sensors, the proposed platform can be tuned to work in two different modes: a high-sensitivity device whose oscillation frequency changes smoothly with the rheological properties of the fluid or a critical viscosity threshold detector, where, for small changes in fluid viscosity, there is a step change in oscillation frequency.