This paper reports on the design and implementation of a single-disk capacitive gyroscope capable of sensing rotation rates around x, y and z axes. A single crystal silicon disk is operated in its appropriate in-plane and out-of-plane modes in the MHz frequency range to sense the z-axis and xy-axis rotation rates, respectively. Utilizing a single disk for measuring rate around all three axes minimizes the form factor compared to approaches using three separate proof masses. Due to high frequency operation, both in-plane and out-of plane modes can achieve high quality factors (Q) in moderate vacuum (1-10Torr), facilitating the wafer-level encapsulation of the device. In addition, the device bandwidth, in the range of 20 to 50Hz, is suitable for the relatively fast response time requirements of consumer electronics applications.

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