This paper presents an overview on recent research progress achieved at PTB for reference 3D nanometrology: (1) development of a new low noise 3D-AFM, which has combined measurement modes of CD-AFM and tilting-AFM in one instrument; (2) accurate calibration of the tip form with a new traceability route using the silicon lattice parameter which is suggested by the Mise en pratique for the realisation of the Metre in nanometrology; (3) development of a novel true 3D AFM probe, referred to as a 3D-Nanoprobe, which has quasi-isotropic stiffness in three directions and is thus more powerful for detecting 3D tip-sample interaction forces in AFM measurements.

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