This paper reviews the recent evolution in CMOS as the emerging very-large-scale-integrated (VLSI) technology. Various CMOS tech nologies and their impact on circuit performance and reliability are dis cussed and compared in generic and special circuit applications. Key issues in CMOS scaling, such as hot-electron effects, buried-channel character istics, latch-up, and isolation requirements, are briefly described. State-ofthe-art CMOS design rules are also addressed. The paper concludes with a discussion on the future trends of CMOS technology development in VLSI circuits.