Soft magnetic carbonyl iron (CI) particles for magnetorheological (MR) polishing encounter corrosion problems as a result of their oxidation, leading to unpredictable polishing results. To overcome this issue, CI particles have been coated with either polymer or inorganic materials for improved MR polishing. In this study, CI particles were coated with poly(methyl methacrylate) to achieve improved MR polishing and anti-corrosion protection. In addition to an analysis of their rheological properties, a series of MR polishing experiments were performed to investigate the material removal rate and surface roughness for BK7 optical glass by changing experimental parameters, such as the wheel rotating speed and magnetic field intensity. A very fine surface roughness (Ra = 0.86 nm for PMMA coated CI/Ra = 0.92 nm for pristine CI) was obtained at a wheel speed of 1256 mm s −1 and a magnetic field intensity of 15.92 kA m −1 .

Recently, micro square pyramid patterns which can be obtained by a light diffusion effect have been widely studied and examined. However, micro pyramid patterns are difficult to fabricate, because of a deburring problem. Therefore, a micro machining technology for the fabrication of micro pyramid patterns has emerged as an essential element. Burr can almost be generated on the edge of the micro pattern when the micro square pyramid pattern is manufactured by a mechanical cutting process. The micro pyramid pattern shape is difficult to maintain as an original form when the burrs are removed. So various methods have been used in an attempt to remove the burrs. A micro magnetorheological (MR) fluid jet polishing process is one of various methods to remove burrs. The process can control shear force for material removing it by a controlled viscosity of the MR fluid due to magnetic-field adjusting. In this paper, magnetic analysis and the deburring process were carried out to fabricate a micro square pyramid pattern on brass (non-magnetic material) and nickel (ferromagnetic material) using a micro MR fluid jet polishing system. Finally, the deburring characteristics and the shape analysis of micro pyramid patterns were investigated by using a micro MR fluid jet polishing system.

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