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Microcontact printing of hydrophobic OTS (Octadecyl-Trichloro-Silane) material was made on various substrates, and finely patterned CdS thin film has been fabricated by CBD (Chemical Bath Deposition) method. In the preliminary experiment, it is confirmed that the size of colloid particle and roughness of surface of CdS thin film are increased with increase of pH, fabrication time and temperature. The optimum condition for the selective deposition of CdS film pattern using the SAM with microcontact printing was determined to be pH 10, temperature of 75°C, deposition time of 15 minute. Various patterns of different shape of CdS thin film were fabricated uniformly and satisfactorily in large area by the conditions determined in the present work. The stoichiometric composition of CdS was confirmed to be 1:1 by EDS and XPS.

Novel fabrication routes of oxide/semiconducting hybrid nanotubes or coaxial nanocables with 30~200 nanometers of radius and ~10 micrometers of length using atomic layer deposition (ALD) and soluble nano-templates was reported. In order to fabricate the hybrid nanotubes using nanotemplates, which were treated with surface modification using SAMs in order to achieve selective deposition only onto inner wall of the template. Deposition of metal oxide layers (TiO2, ZrO2) conformally and uniformly onto the wall of templates using ALD. To fabricate metal oxide/CdS nanocables or coaxial nanotubes, CdS was deposited onto metal oxide nanotubes by chemical bath deposition. Coaxial nanocables was also 30-200 nm in diameter and 1-10 in lengths.

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