Electro-thermal models are commonly used in simulations and designing MEMS devices, also in case of microbolometers. These models allow to estimate sensors performance before fabrication that consequently impacts on fabrication cost. Coupling of electric and thermal domains and building appropriate model for carrying out simulations are crucial to detect all phenomena having impact for Readout Integrated Circuit. This article brings closer to the subject matter of circuit modelling (willingly implemented in MATLAB/SIMULINK or PSPICE tools) and to its theoretical background.

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The constant development and miniaturization of MEMS sensors invariably provides new possibilities for their use in health-related and medical applications. The application of MEMS devices in posturographic systems allows faster diagnosis and significantly facilitates the work of medical staff. MEMS accelerometers constitute a vital part of such systems, particularly those intended for monitoring patients with imbalance disorders. The correct design of such sensors is crucial for gathering data about patient movement and ensuring the good overall performance of the entire system. This paper presents the design and measurements of a three-axis accelerometer dedicated for use in a device which tracks patient movement. Its main focus is the characterization of the sensor, comparing different designs and evaluating the impact of the packaging and readout circuit integration on sensor operation. Extensive testing and measurements confirm that the designed accelerometer works correctly and allows identifying the best design in terms of sensitivity/stability. Moreover, the response of the proposed sensor as a function of the applied acceleration demonstrates very good linearity only if the readout circuit is integrated in the same package as the MEMS sensor.

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