Temporal measurement of electron density, metastable-atom density, and reduced electric field are used to infer the dynamic behavior of the excitation rates describing electron-atom collision-induced excitation in the positive column of a 1 Torr argon plasma by invoking plausible assumptions regarding the shape of the electron energy distribution function performed in Adams et al (2012 Phys. Plasmas 19 023510). These inferred rates are used to predict the 420.1 nm to 419.8 nm argon emission ratio, which agree with experimental results when the assumptions are applicable. Thus the observed emission ratio is demonstrated to be dependent on the metastable-atom density, electron density, and reduced electric field. The established confidence in the validity of this emission-line-ratio model allows us to predict metastable argon-atom density during the post-transient phase of the pulse as suggested by De Joseph et al (2005 Phys. Rev. E 72 036410). Similar inferences of electron density and reduced electric field based on readily available diagnostic signatures may also be afforded by this model. Keywords: optical emission spectroscopy (OES), 420.1-419.8 nm emission-line ratio, 1s 5 metastable argon atom, reduced electric field (E/N), electron energy distribution, time-resolved, extended corona model

We present a novel radio-frequency (RF) power supply and impedance matching to drive technological plasmas with customized voltage waveforms. It is based on a system of phase-locked RF generators that output single frequency voltage waveforms corresponding to multiple consecutive harmonics of a fundamental frequency. These signals are matched individually and combined to drive a RF plasma. Electrical filters are used to prevent parasitic interactions between the matching branches. By adjusting the harmonics' phases and voltage amplitudes individually, any voltage waveform can be approximated as a customized finite Fourier series. This RF supply system is easily adaptable to any technological plasma for industrial applications and allows the commercial utilization of process optimization based on voltage waveform tailoring for the first time. Here, this system is tested on a capacitive discharge based on three consecutive harmonics of 13.56 MHz. According to the Electrical Asymmetry Effect, tuning the phases between the applied harmonics results in an electrical control of the DC self-bias and the mean ion energy at almost constant ion flux. A comparison with the reference case of an electrically asymmetric dual-frequency discharge reveals that the control range of the mean ion energy can be significantly enlarged by using more than two consecutive harmonics.

In recent years, polymer surfaces have become increasingly popular for biomolecule attachment because of their relatively low cost and desirable bulk physicochemical characteristics. However, the chemical inertness of some polymer surfaces poses an obstacle to more expansive implementation of polymer materials in bioanalytical applications. We describe use of argon plasma to generate reactive hydroxyl moieties at the surface of polystyrene microtiter plates. The plates are then selectively functionalized with silanes and cross-linkers suitable for the covalent immobilization of biomolecules. This plasma-based method for microtiter plate functionalization was evaluated after each step by X-ray photoelectron spectroscopy, water contact angle analysis, atomic force microscopy, and bioimmobilization efficacy. We further demonstrate that the plasma treatment followed by silane derivatization supports direct, covalent immobilization of biomolecules on microtiter plates and thus overcomes challenging issues typically associated with simple physisorption. Importantly, biomolecules covalently immobilized onto microtiter plates using this plasma-based method retained functionality and demonstrated attachment efficiency comparable to commercial preactivated microtiter plates.

Capacitively coupled radio frequency plasmas driven by customized voltage waveforms provide enhanced opportunities to control process-relevant energy distributions of different particle species. Here, we present an experimental investigation of the spatio-temporal electron heating dynamics probed by Phase-Resolved Optical Emission Spectroscopy (PROES) in an argon discharge driven by up to three consecutive harmonics of 13.56 MHz with individually adjustable harmonics' amplitudes and phases. PROES and voltage measurements are performed at fixed total voltage amplitudes as a function of the number of driving harmonics, their relative phases, and pressure to study the effects of changing the applied voltage waveform on the heating dynamics in collisionless and collisional regimes. Additionally, the ion energy distribution function (IEDF) is measured at low pressure. In this collisionless regime, the discharge is operated in the a-mode. The velocity of energetic electron beams generated by the expanding sheaths is found to be affected by the number of driving harmonics and their relative phases. This is understood based on the sheath dynamics obtained from a model that determines sheath voltage waveforms. The formation of the measured IEDFs is understood and found to be directly affected by the observed changes in the electron heating dynamics. It is demonstrated that the mean ion energy can be controlled by adjusting the harmonics' phases. In the collisional regime at higher pressures changing the number of harmonics and their phases at fixed voltage is found to induce heating mode transitions from the ato the c-mode. Finally, a method to use PROES as a non-invasive diagnostic to monitor and detect changes of the ion flux to the electrodes is developed. V C 2015 AIP Publishing LLC.

Ar metastable atoms are important energy carriers and surface interacting species in low-temperature plasmas that are difficult to quantify. Ar metastable atom densities (N Ar,m) in inductively coupled Ar and Ar/H 2 plasmas were obtained using a model combining electrical probe measurements of electron density (N e) and temperature (T e), with analysis of spectrally resolved Ar plasma optical emission based on 3p → 1s optical emission ratios of the 419.8 nm line to the 420.1 nm line. We present the variation of N Ar,m as the Ar pressure and the addition of H 2 to Ar are changed comparatively to recent adsorption spectroscopy measurements.