We report on a hybrid method for fabrication of arrays of GaN nanocrystals by low-temperature UHV selective growth on pre-patterned silicon substrates covered by native oxide. Patterning of the substrates was performed by using a gallium focused ion beam (FIB). To get GaN nanocrystals at specific positions, Ga droplets were created at FIB patterned sites by evaporation of Ga atoms at 280°C substrate temperature first, and then modified by their post-nitridation using an ultra-low energy (50 eV) nitrogen ion-beam at a sample temperature of 200°C. To get larger arrays of GaN nanocrystals (≈150 nm and 200 nm in diameter), such a sequential process was repeated in several cycles at slightly modified operation conditions. The quality of the nanocrystals was checked by measurement of their photoluminescence properties which proved the occurrence of the peak of a band edge emission at around 367 nm (3.38 eV).

Surface-enhanced Raman spectroscopy (SERS) is a perspective nondestructive analytic technique enabling the detection of individual nanoobjects, even single molecules. In this paper, we have studied the morphology of Ga islands deposited on chemical vapor deposition graphene by ultrahigh vacuum evaporation and local optical response of this system by the correlative Raman imaging and scanning electron microscopy (RISE). Contrary to the previous papers, where only an integral Raman response from the whole ununiformed Ga nanoparticles (NPs) ensembles on graphene was investigated, the RISE technique has enabled us to detect graphene Raman peaks enhanced by single Ga islands and particularly to correlate the Raman signal with the shape and size of these single particles. In this way and by a support of numerical simulations, we have proved a plasmonic nature of the Raman signal enhancement related to localized surface plasmon resonances. It has been found that this enhancement is island-size-dependent and shows a maximum for medium-sized Ga islands. A reasonable agreement between the simulations of the plasmon enhancement of electric fields in the vicinity of Ga islands and the experimental intensities of corresponding Raman peaks proved the plasmonic origin of the observed effect known as SERS.

As the characteristic dimensions of modern top-down devices are getting smaller, such devices reach their operational limits given by quantum mechanics. Thus, two-dimensional (2D) structures appear as one of the...