The ability to detect a few molecules present in a large sample is of great interest for the detection of trace components in both medicinal and environmental samples. Surface enhanced Raman spectroscopy (SERS) is a technique that can be utilized to detect molecules at very low absolute numbers. However, detection at trace concentration levels in real samples requires properly designed delivery and detection systems. The following work involves superhydrophobic surfaces that have as a framework deterministic or stochastic silicon pillar arrays formed by lithographic or metal dewetting protocols, respectively. In order to generate the necessary plasmonic substrate for SERS detection, simple and flow stable Ag colloid was added to the functionalized pillar array system via soaking. Native pillars and pillars with hydrophobic modification are used. The pillars provide a means to concentrate analyte via superhydrophobic droplet evaporation effects. A ≥ 100-fold concentration of analyte was estimated, with a limit of detection of 2.9 × 10(-12) M for mitoxantrone dihydrochloride. Additionally, analytes were delivered to the surface via a multiplex approach in order to demonstrate an ability to control droplet size and placement for scaled-up uses in real world applications. Finally, a concentration process involving transport and sequestration based on surface treatment selective wicking is demonstrated.

Silicon nanopillars are important building elements for innovative nanoscale systems with unique optical, wetting, and chemical separation functionalities. However, technologies for creating expansive pillars arrays on the submicron scale are often complex and with practical time, cost, and method limitations. Herein we demonstrate the rapid fabrication of nanopillar arrays using the thermal dewetting of Pt films with thicknesses in the range from 5 to 19 nm followed by anisotropic reactive ion etching (RIE) of the substrate materials. A second level of roughness on the sub-30 nm scale is added by overcoating the silicon nanopillars with a conformal layer of porous silicon oxide (PSO) using room temperature plasma enhanced chemical vapor deposition (PECVD). This technique produced environmentally conscious, economically feasible, expansive nanopillar arrays with a production pathway scalable to industrial demands. The arrays were systematically analyzed for size, density, and variability of the pillar dimensions. We show that these stochastic arrays exhibit rapid wicking of various fluids and, when functionalized with a physiosorbed layer of silicone oil, act as a superhydrophobic surface. We also demonstrate high brightness fluorescence and selective transport of model dye compounds on surfaces of the implemented nanopillar arrays with two-tier roughness. The demonstrated combination of functionalities creates a platform with attributes inherently important for advanced separations and chemical analysis.

The importance of fluorescent detection in many fields is well established. While advancements in instrumentation and the development of brighter fluorophore have increased sensitivity and lowered the detection limits of the method, additional gains can be made by manipulating the local electromagnetic field. Herein we take advantage of silicon nanopillars that exhibit optical resonances and field enhancement on their surfaces and demonstrate their potential in improving performance of biomolecular fluorescent assays. We use electron beam lithography and wafer scale processes to create silicon nanoscale pillars with dimensions that can be tuned to maximize fluorescence enhancement in a particular spectral region. Performance of the nanopillar based fluorescent assay was quantified using two model bioaffinity systems (biotin-streptavidin and immunoglobulin G-antibody) as well as covalent binding of fluorescently tagged bovine serum albumin (BSA). The effects of pillar geometry and number of pillars in arrays were evaluated. Color specific and pillar diameter dependent enhancement of fluorescent signals is clearly demonstrated using green and red labels (FITC, DyLight 488, Alexa 568, and Alexa 596). The ratios of the on pillar to off pillar signals normalized by the nominal increase in surface area due to nanopillars were found to be 43, 75, and 292 for the IgG-antibody assay, streptavidin-biotin system, and covalently attached BSA, respectively. Applicability of the presented approaches to the detection of small numbers of molecules was evaluated using highly diluted labeled proteins and also control experiments without biospecific analytes. Our analysis indicates that detection of fewer than 10 tagged proteins is possible.