Sputtered thin film and multilayer x-ray mirrors are made at the Advanced Photon Source (APS) deposition lab for the APS users. Film thickness calibrations are carried out using in situ and ex situ spectroscopic ellipsometry, interferometry, and x-ray reflectometry. Here, we present a systematic study of thickness and optical constant determination of sputtered thin films of Au, Pt, Pd, Rh, Cr, Cu, as well as W and C, using in situ ellipsometry. Multiple data sets were obtained for each film material with incremental thicknesses and were analyzed with their correlation in mind. Results are compared with those obtained from interferometry and x-ray reflectivity measurements. The applications and limitations of spectroscopic ellipsometry for metal thin films are discussed. Observations of a relaxation effect of a Rh/Si film and a difference in growth mode in the Cr/Si system compared with other metal/Si systems are presented.

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We desc~ibe:q;:tunablemuhikiyer monochromatorwith an adjustkbIebandpass to be used for reflectivity y and gr~ing.hicichce diffraction studies on surfacesat energies near 10 keV, Multilayers have a bandpass typically 'l@times kwgerthanthe Si (111)reflection,and by using mukilayers an experiment =n significantly:ii@ase data collection rates over those available with a Si monochrmnator.The transmission thiough~1.ati#2 lateraIlygraded mu]ti]ayer (f.GML)reflections was recorded versus photon energy. The identical 'LGMLs were comprised of 60 bilayersof W and C on 100x25x 3 mm float glass with a bilayer spacing @ryi~gfkom3S to 60 A,~e average gradient was 0.27~mm along the !ong dhxmsion. The rma deviation;$f the data for the bilayerspacing from a linear fit was 0,36& Data were obtained for a n~di~i+d~(~)'double.multila~~gement.The relative bandpass width~when the two .. .. tnultila~,s$osed the same bilayer spacing was measured m be 2.2% with a transmission of 78.7+ 1.6 %. This v~@@c-onsistentwith the transmission of 88.9% that we also measured for a single LGML at H4SYLAB:@@dine D4. The bandpaaswas tunable in the range 1,1%to 2.2%.

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