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When driving the piezoelectric transducer (PT: piezo transducer), which is a key device, it is important for the ultrasonic system (using ultrasonic waves of 20 kHz or higher) to operate at a resonant frequency that can maximize the conversion of mechanical energy (vibration) from electrical energy. The resonant frequency of the PT changes during the actual operation according to the load fluctuations and environmental conditions. Therefore, to maintain a stable output in an ultrasonic system, it is essential to track the resonant frequency in a short time. In particular, fast resonant frequency tracking (RFT: resonant frequency tracking) is an important factor in the medical ultrasonic system, i.e., the system applied in this thesis. The reason is that in the case of a medical ultrasonic system, heat-induced skin necrosis, etc., may cause the procedure to be completed within a short period of time. Therefore, tracking the RFT time for maximum power transfer is an important factor; in this thesis, we propose a new high-speed RFT method. The proposed method finds the whole system resonance frequency by using the transient phenomenon (underdamped response characteristic) that appears in an impedance system, such as an ultrasonic generator, and uses this to derive the mechanical resonance frequency of the PT. To increase the accuracy of the proposed method, parameter fluctuations of the pressure of the PT, the equivalent circuit impedance analysis of the PT, and a MATLAB simulation were performed. Through this, the correlation between the resonance frequency of the ultrasonic system, including the LC filter with nonlinear characteristics and the mechanical resonance frequency of the PT, was analyzed. Based on the analyzed results, a method for tracking the mechanical resonance frequency that can transfer the maximum output to the PT is proposed in this thesis. Experiments show that using the proposed high-speed RFT method, the ultrasonic system can track the mechanical resonance frequency of the PT with high accuracy in a short time.

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