We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 °C and transferred to 5 µm thick solution-cast polyimide via dissolution of an underlying release layer. Underwater pitch–catch testing between two neighboring 100 µm × 1000 µm elements showed a 0.2 mV signal at a 1.5 cm distance for a driving voltage of 5 V peak at 9.5 MHz. With the same excitation, a 33 kPa sound pressure output at a 6 mm distance and a 32% bandwidth at −6 dB were measured by hydrophone.

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Piezoelectric micromachined ultrasound transducers (PMUT) incorporating lead zirconate titanate PbZr0.52Ti0.48O3 (PZT) thin films were investigated for miniaturized high-frequency ultrasound systems. A recently developed process to remove a PMUT from an underlying silicon (Si) substrate has enabled curved arrays to be readily formed. This research aimed to improve the design of flexible PMUT arrays using PZFlex, a finite element method software package. A 10 MHz PMUT 2D array working in 3-1 mode was designed. A circular unit-cell was structured from the top, with concentric layers of platinum (Pt)/PZT/Pt/titanium (Ti) on a polyimide (PI) substrate. Pulse-echo and spectral response analyses predicted a center frequency of 10 MHz and bandwidth of 87% under water load and air backing. A 2D array, consisting of the 256 (16 × 16) unit-cells, was created and characterized in terms of pulse-echo and spectral responses, surface displacement profiles, crosstalk, and beam profiles. The 2D array showed: decreased bandwidth due to protracted oscillation decay and guided wave effects; mechanical focal length at 2.9 mm; 3.7 mm depth of field for -6 dB; and -55.6 dB crosstalk. Finite element-based virtual prototyping identified figures of merit—center frequency, bandwidth, depth of field, and crosstalk—that could be optimized to design robust, flexible PMUT arrays.

In pressure vessel and pipe inspection, ultrasonic nondestructive evaluation plays a pivotal role in both in-situ and laboratory examinations. Scanning acoustic microscopy (SAM) has been a well-recognized laboratory tool for both visualization and quantitative evaluation of pressure vessel and piping materials at the microscale since its invention in 1974. While there have been multiple advances in SAM over the past four decades, some issues still remain to be addressed. First, the measurement speed is limited by the mechanical movement of the acoustic lens and the sample stage. Second, a single-element transducer with an acoustic lens forms a predetermined beam pattern for a fixed focal length and incident angle, thereby limiting control of the inspection beam. Here, we propose to develop a phased-array probe as an alternative to overcome these issues. Preliminary studies to design a practical high-frequency phased-array acoustic microscope probe were explored. A linear phased-array, comprising 32 elements and operating at 5 MHz, was modeled using PZFlex, a finite element method software. This phased-array system was characterized in terms of electrical input impedance response, pulse-echo and impulse response, surface displacement profiles, mode shapes, and beam profiles. Details of the construction of the model and the results are presented in this paper. Development of a phased-array acoustic microscope probe will significantly enhance scanning acoustic microscopy techniques for detecting surface and subsurface defects and microstructural changes in laboratory samples of pressure vessel and piping materials.