The majority electron and minority hole mobilities have been calculated in GaAs for donor densities between 5×1016 and 1×1019 cm−3. Similarly, the majority hole and minority electron mobilities have been calculated for acceptor densities between 5×1016 and 1×1020 cm−3. All the important scattering mechanisms have been included. The ionized impurity and carrier–carrier scattering processes have been treated with a phase-shift analysis. These calculations are the first to use a phase-shift analysis for minority carriers scattering from majority carriers. The results are in good agreement with experiment, but predict that at high dopant densities minority mobilities should increase with increasing dopant density for a short range of densities. This effect occurs because of the reduction of plasmon scattering and the removal of carriers from carrier–carrier scattering because of the Pauli exclusion principle. Some recent experiments support this finding. These calculations do not treat the density-of-states modifications due to heavy doping, which should have only a small effect on the mobility at room temperature. The results are important for device modeling because of the need to have values for minority mobilities.

Summary:Two computer codes for simulating the backscattered, transmitted, and secondary-electron signals from targets in a scanning electron microscope are described. The first code, MONSEL-II, has a model target consisting of three parallel lines on a three-layer substrate, while the second, MON-SEL-III, has a model target consisting of a two-by-two array of finite lines on a three-layer substrate. Elastic electron scattering is determined by published fits to the Mott cross section. Both plasmon-generated electrons and ionized valence electrons are included in the secondary production. An adjustable quantity, called the residual energy loss rate, is added to the formula of Joy and Luo to obtain the measured secondary yield. The codes show the effects of signal enhancement due to edge transmission, known as blooming, as well as signal reduction due to neighboring lines, known as the "black-hole" effect.

A scanning capacitance microscope (SCM) has been implemented by interfacing a commercial contact-mode atomic force microscope with a high-sensitivity capacitance sensor. The SCM has promise as a next-generation dopant-profiling technique because the measurement is inherently two dimensional, has a potential spatial resolution limited by tip diameter of at least 20 nm, and requires no current carrying metal–semiconductor contact. Differential capacitance images have been made with the SCM of a variety of bulk-doped samples and in the vicinity of pn junctions and homojunctions. Also, a computer code has been written that can numerically solve Poisson’s equation for a model SCM geometry by using the method of collocation of Gaussian points. Measured data and model output for similar structures are presented. How data and model output can be combined to achieve an experimental determination of dopant profile is discussed.

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