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Vanadium oxide has various oxidation states (e.g., V 2 O 5 , VO 2 , and V 3 O 5 ). Most of these groups have metal-insulator transition (MIT) characteristic that changes the electrical properties with temperature. 1,2 Among them, the MIT of VO 2 occurs at the most suitable temperature (~68°C), facilitating its industrial application. 3 It is known that the MIT of VO 2 is caused by the splitting of 3d 1 band orbital. 4,5 Since this split changes the carrier concentration, not only the electrical properties but also the optical properties undergo changes. Moreover, a crystal structure change occurs between the monoclinic and rutile, causing a difference in density as the distance between the vanadium atoms changes. 6 Therefore, various applications (e.g., smart windows, transistors, optical switch, and strain sensors) using the MIT of VO 2 have been developed and researched. [7][8][9][10][11][12][13][14][15][16][17][18][19][20][21][22][23] The difference in the densities of the metal and insulator phases complicates the commercialization of these applications, as it can result in deterioration, disuse, or even fracture of the materials during cycling. Therefore, it is necessary to understand the mechanical properties of each phase in detail.

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