In this paper, we investigate the efficiency enhancement of blue InGaN/GaN light-emitting diodes (LEDs) by incorporating a burried air void photonic crystal (BAVPC) layer within the epitaxial structure. As compared with the conventional patterned sapphire substrate (C-PSS) LEDs and flat sapphire substrate LEDs with BAVPC, the fabricated patterned sapphire substrate (PSS) LEDs with BAVPC exhibit the lowest full-width at half-maximum of (002) and (102) diffraction peaks, the highest light output power of 20.6 mW, and the highest external quantum efficiency of 37.4%. Remarkable performance improvement in the PSS LED with BAVPC is attributed to the better epitaxial quality with threading dislocations terminated by the BAVPC and the higher scattering at interface between GaN and air-void. By positioning the BAVPC directly below the multiple quantum wells (MQWs), it would cause the reduction in the number of trapped optical modes. The methodology optically isolates the MQWs from the underlying substrate and increases the optical output power. Moreover, threading dislocations are significantly suppressed using the BAVPC with high air filling fraction of ∼50%. It is well proposed that this methodology provides a promising alternative to C-PSS LEDs. Index Terms-Light-emitting diode (LED), burried air void photonic crystal (BAVPC), patterned sapphire substrate (PSS), nanoimprint lithography (NIL).

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In this paper, the performance improvement of 380-nm InGaN/AlGaN ultraviolet light-emitting diodes (UV-LEDs) is investigated by incorporating an undoped Al(In)GaN thin interlayer between the InGaN well and AlGaN barrier in multiquantum-well (MQW) active region. By inserting the graded-composition AlGaN and AlInGaN thin interlayers, the light output powers of UV-LEDs are significantly increased by 70% and 105% at 20 mA, respectively, as compared with the LED without the interlayer. Remarkable efficiency enhancement in the UV-LEDs with graded-composition AlGaN and AlInGaN interlayers is mainly attributed to the further improvement of the electron confinement and hole injection with more uniform distribution in the MQW active region. Besides, photoluminescence and atomic force microscope analyses indicate that the MQW quality can be enhanced by incorporating a graded-composition AlInGaN thin interlayer in the MQW active region of UV-LEDs.Index Terms-Ultraviolet light-emitting diode (UV-LED), multi-quantum-well (MQW), Al(In)GaN interlayer, photoluminescence (PL).

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