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The exact solution for the bending problem of a free-end point loaded filmsubstrate cantilever with arbitrary film-to-substrate thickness ratio is obtained by using the basic mechanical equilibrium equation. And then the problem of design and optimization for microactuator buildup of film-substrate cantilever is discussed by taking into account the effect of geometrical and physical parameters of the cantilever components. Furthermore, the optimal condition for actuator application is presented and some theoretical problems are clarified. The results show that, in general, the greater the film-to-substrate thickness ratio, the higher the ability of taking load, namely the larger the exerted force of the cantilever when the thickness of substrate is kept constant. When the total thickness of the cantilever is kept constant, however, the free-end exerted force will experience a maximum and this maximum value of the exerted force will decrease with the increasing film-to-substrate stiffness ratio. Meanwhile, the optimal thickness ratio corresponding to this maximum exerted force also decreases with the increasing stiffness ratio. Whether for the cases of fixed substrate or fixed total thickness, the influence of Poisson's ratio of two cantilever components on the exerted force is remarkable, and should not be neglected. magnetic film-substrate system, cantilever, deflection, actuator, exerted force Microactuator [1,2] and microsensor [3] are the most important topic of current research on microelectromechanical system (MEMS) [1][2][3][4][5] , in which the microelectromechanical device made of nano-magnetostrictive materials possess many advantages over the piezoelectric devices, such as non-contact driving, high load and large response at low field. Especially, the cantilevered film-substrate system made of giant magnetostrictive material is the most promising for the making of microsensors and microactuators [6] . Since the cantilever actuating system is based on the

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The effect of stress anisotropy on ferromagnetic resonance frequency is investigated in ferromagnetic/antiferromagnetic bilayers with exchange anisotropy and uniaxial magnetocrystalline anisotropy. The intensity and the direction of applied magnetic field dependence of resonant frequencies are studied for different stress anisotropies. It is shown that resonant frequency can be tunable by the intensity and the direction of the stress anisotropy. Moreover, the easy axis and hard axis can be changed significantly by taking into account stress anisotropy field and exchange anisotropy field. The jump phenomenon in the angular dependence of stress anisotropy has been explained by analyzing the magnetization reversal processes.