Based on 30 keV silver ions at a fluence of 6 × 1016 ions·cm−2 implanted into SiO2, Al2O3 and YAG, we found that the nanocomposite layers embedded with silver nanoparticles are sensitive to the refractive index of overlays on the implanted surface. By dropping liquids with different refractive indices on the surface of nanocomposite layer, the reflection spectra of the rear surface would shift. The sample with YAG as the substrate has better performance by comparing with the other two samples. The prepared structures have the advantages of simple structure and stable performance, which has potential applications in localized surface plasmon resonance sensors.

The Au/SiO2-SiO2 multilayer periodic structure was fabricated by ion implantation and radio-frequency magnetron sputtering. We proposed a scheme to change the refractive index of the nanocomposite layer based on the important influence of the annealing temperatures on the Au nanoparticles (NPs), and analyzed the changes in the size, volume fraction and dipolar interaction factor of the Au NPs at different temperatures. As a result, the reflectivity of the sample with four periods increased from 65.0% to 82.6% at 800 °C. This method is promising as an application to prepare large-scale photonic integrated circuits as a small size but efficient Bragg reflector.

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