No abstract

In order to research the effects of vibration aging on micro-scale thin films, a high frequency vibration system is designed for the aging of a polymer AZ4620 photoresist film. The profile method is adopted to predict the residual stresses in the film. A laser measuring device is constructed to measure the sample profiles in the experiment. The excitation frequencies for vibration aging are determined using the finite element method. The effects of vibration parameters on aging results are studied, such as excitation frequency, vibration aging time, exciting power and vibration acceleration. Results show that the more vibration nodes that existed in sample's inherent mode, the better vibration aging results can be obtained under this excitation frequency. Under the excitation frequency of 6932 Hz and excitation current 5 A, and vibration aging for only 14 min, the residual stress elimination rate already reached 51.52%.