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Carbon films from fullerene C 60 were coated on the surface of lithium metal for the anode of lithium secondary battery. In order to investigate the relationship between the electrochemical characteristics of the carbon films and deposition technique, three different vacuum techniques were employed such as RF (radio frequency)-magnetron sputtering of C 60 , plasma assisted thermal evaporation of C 60 and ion beam assisted thermal evaporation of fullerene C 60 . From the physical and chemical characterization tests, we found that the carbon films produced by those above techniques mainly consist of sp 2 /sp 3 hybridized amorphous carbons. Electrochemical tests implied that the cyclic performance was enhanced by the fullerene C 60 coating on lithium metal anode in comparison to the pure lithium metal one. This enhanced performance is due to the formation of thin carbon film on the surface of lithium metal anode which plays a role as a passive layer against the side reaction between lithium metal and the electrolyte.

Effects of substrate temperature and phosphor doping on electrochemical characteristics of the silicon film anode were investigated. The silicon thin films were synthesized directly on copper foil by radio-frequency capacitively coupled plasma-enhanced chemical-vapor deposition (r.f.-CVD). The cyclability of the silicon anode greatly depends on the surface morphology and surface resistivity. The silicon film anodes which have granular structure and high conductivity showed higher cyclabilty than those of planer and low conductivity, respectively.

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