Liquid phase deposition (LPD) is one of a production of oxide film, which is useful due to low reaction temperature and production cost. Previously, there have been many efforts to investigate the LPD on the flat surface in view of thickness, density, and composition of oxide film. The coating of nanomaterials using LPD was recently reported, but the mechanism of LPD on the nanostructured surface has not yet been conducted. In this work, we compared the LPD of silicon dioxide on the flat surface and nanostructured surface which is hexagonally close-packed silica beads array. We demonstrated that the nanostructured topography of surface induced local deposition of silicic acid unlike flat surface, resulting in the interesting shape of silica beads. Further, we proposed the different mechanism of local LPD between flat surface and nanostructured surface.

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