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In this study, c-axis oriented AlN and Al 1−x Sc x N films have been successfully grown on Si (100) and quartz glass by DC magnetron reactive sputtering method. The crystalline structure, optical properties and nanomechanical properties of AlN thin films are investigated by X-ray diffraction (XRD), Raman spectroscopy and nanoindentation techniques, respectively. The XRD patterns show that the crystal structure of the Al 1−x Sc x N films was (002) orientation. The frequency of the E 2 (high) mode observed in the Al 1−x Sc x N films shows higher red shift compared to that observed in AlN film. The nanoindentation hardness and elastic results of Al 1−x Sc x N films were 16 GPa and 190 GPa compared to that of 11.2 GPa and 110.4 GPa for AlN film.

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