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Microgroove structures with helical pitches in a wavelength level are increasingly required in optical areas. However, conventional manufacturing techniques generate relatively high stresses during pressing, resulting in poor precision when forming microgrooves. This paper reports on the mechanism of the ultrasonic vibration-assisted microgroove forming of precise hot-pressed optical glass. A finite element (FE) thermocompression model of the viscoelastic material was developed and the entire forming process was numerically simulated using coupled thermal-structural analysis. The analysis of several process parameters was carried out using orthogonal experiments, from which the optimum combination of parameters was selected. The glass thermoforming process is also assisted by ultrasonic vibration. The thermal and mechanical effects of vibration improved material flow and optimized forming results. The average maximum stress in the glass during the forming process was only 3.04 × 10−3 Mpa, while the maximum stress in the hot-pressing stage without ultrasound was 1.648 Mpa. The stress results showed that the material-forming stress is significantly reduced.

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