This paper presents a model of a silicon microphone with active electronic damping. The microphone has low passive damping to minimize thermal noise, and employs active damping from electrostatic actuation to improve its dynamic performance. To apply the linear robust control approach, the nonlinear dynamic system is modeled as a linear system with bounded parameters, and a controller is designed using the ∞ H method which successfully drives the electrostatic actuator to generate the desired active damping. The effectiveness of the controller has been verified through simulation in both frequency and time domains.

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This paper presented an H∞-controller design to achieve active damping for a MEMS microphone system. The parametric uncertainties introduced by linearization process were modeled. The stability and performance of the closed-loop system were analyzed for the uncertain microphone model and both were shown to be robust. The nonlinear simulation further verifies that the controller offers the desired performance.