All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of onchip mechanical resonators which exhibit fundamental modes with frequencies f and mechanical quality factors Qm sufficient to enter the optomechanical quantum regime at room temperature. We overcome previous limitations by designing ultrathin, high-stress silicon nitride (Si3N4) membranes, with tensile stress in the resonators' clamps close to the ultimate yield strength of the material. By patterning a photonic crystal on the SiN membranes, we observe reflectivities greater than 99%. These on-chip resonators have remarkably low mechanical dissipation, with Qm∼10 8 , while at the same time exhibiting large reflectivities. This makes them a unique platform for experiments towards the observation of massive quantum behavior at room temperature.

Multielement cavity optomechanics constitutes a direction to observe novel effects with mechanical resonators. Several exciting ideas include superradiance, increased optomechanical coupling, and quantum effects between distinct mechanical modes among others. Realizing these experiments has so far been difficult, because of the need for extremely precise positioning of the elements relative to one another due to the high-reflectivity required for each element. Here we overcome this challenge and present the fabrication of monolithic arrays of two highly reflective mechanical resonators in a single chip. We characterize the optical spectra and losses of these 200 μm long Fabry-Pérot interferometers, measuring finesse values of up to 220. In addition, we observe an enhancement of the coupling rate between the cavity field and the mechanical center-of-mass mode compared to the single membrane case. Further enhancements in coupling with these devices are predicted, potentially reaching the single-photon strong coupling regime, giving these integrated structures an exciting prospect for future multimode quantum experiments.

Demand for lightweight, highly reflective and mechanically compliant mirrors for optics experiments has seen a significant surge. In this aspect, photonic crystal (PhC) membranes are ideal alternatives to conventional mirrors, as they provide high reflectivity with only a single suspended layer of patterned dielectric material. However, due to limitations in nanofabrication, these devices are usually not wider than 300 μm. Here we experimentally demonstrate suspended PhC mirrors spanning areas up to 10 × 10 mm. We overcome limitations imposed by the size of the PhC and measure reflectivities greater than 90 % on 56 nm thick mirrors at a wavelength of 1550 nm-an unrivaled performance compared to PhC mirrors with micro scale diameters. These structures bridge the gap between nano scale technologies and macroscopic optical elements.

A simple optical inclinometer based on a phaseshifted Bragg grating in a taper configuration is proposed. Two phase-shifted fiber Bragg gratings were fabricated using a DUV femtosecond laser technique in the taper region, with taper waist diameters of 30 μm and 50 μm. Both sensing heads were compared based on their response to angle and strain. Whereas the higher diameter sensor yielded a higher sensitivity to curvature (23.8 ± 0.3 pm/degree), the lower diameter one was more sensitive to strain (8.94 ± 0.04 pm/με).

A simple optical inclinometer based on phase-shifted Bragg grating in a taper configuration is proposed. The phaseshifted FBG was fabricated using a DUV femtosecond laser technique in the taper region. The sensing head was characterized for different angle curvatures and also to strain. The angle and strain sensitivities of the inclinometer are 13.15 pm/degree and 8.96 pm/.