Thin films of ZnO have been grown by low-pressure MOCVD using methylzinc isopropoxide, MeZn(OPi), and methylzinc tert-butoxide, MeZn(OBu*), in the absence of an added oxygen source. The films were grown on to glass substrates in the temperature range 250-400 "C with growth rates of between 0.2 and 4.4 pm h-'.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.