For implanted phosphorus in the dose range of 5×1013/cm2–4×1014/cm2, up to half the implanted dose may be lost during low thermal budget anneals due to transient diffusion and anomalous segregation at the Si–SiO2 interface. The phosphorus atoms, rendered mobile by the implant damage, stick in the oxide near the interface where they are electrically inactive and can be removed by stripping the surface oxide. Such a dose loss needs to be accounted for in a typical device fabrication process.

No abstract

No abstract

No abstract

Nanocomposite structures composed of ferromagnetic particles dispersed in a matrix are systems in which the magnetic properties can be tailored by varying the size and spacing of the ferromagnetic particles. Nanocompo$i~es of SmCos in a non-magnetic Nb0.dk8.67 matrix exhibit a wide variety of magnetic properties. SmCos powder is premilled prior to mechanical alloying. The premilliing results in a maximum coercivity of 16 kOe after 2 hours of milling, and an enhanced remanence ratio. Both features may be due to exchange anisotropy and/or exchange coupling between hard and soft ferromagnetic phases. The nanocomposite samples show that, when the SmCos particulates are small enough, the primary effect of alloying is to disperse them throughout the matrix with no further refinement of size.