Nanofabrication is an indispensable process in nanoscience and nanotechnology. Unconventional lithographic techniques are often used for fabrication as alternatives to photolithography because they are faster, more cost-effective, and simpler to use. However, these techniques are limited in scalability and utility because of the collapse of preprinted structures during step-and-repeat processes. This study proposes a new class of temperaturecontrollable polymeric molds that are coated with a metal such that any site-specific patterning can be accomplished in a programmable manner using selective contact-dewetting lithography. The lithography allows sub-100 nm patterning, step-and-repeat processing, and hierarchical structure fabrication. The programmable feature of the lithography can be utilized for the structural coloring and shaping of objects. Large-area programmable patterning, semiconductor device manufacturing, and the fabrication of iridescent security devices would benefit from the unique features of the proposed strategy.

In article number https://doi.org/10.1002/adfm.201702993, Kwang Su Kim, Jong Uk Kim, and co‐workers present a hierarchical structure created by multiple molding with a metal‐coated mold, which is able to precisely control its temperature via joule‐heating. Due to the characteristics of the mold, this technique has a great potential for large‐area programmable patterning, and 3D hierarchical structuring via step‐and‐repeat processes.