No abstract

Rosai-Dorfman disease of the orbit is a rare clinical entity. Purely extranodal disease is rare, with isolated orbital disease being exceedingly rare. This study is unique in that 4 of 8 patients had strictly isolated extranodal disease of the orbit. A large majority of the cases had disease in the extraconal space, contrasting with previous reports. In addition, lacrimal gland disease, particularly bilateral involvement, was prominent in the current study. Although there is no consensus on treatment, surgical excision should be attempted if plausible in symptomatic patients especially if the orbit represents a localized site of disease.

Test mask for characterizing pattern dependent variation of the remaining thickness after chemical-mechanical polishing (CMP) was designed with taking the experimentally obtained interaction distance into consideration. Measured interaction distance was constant independent of pattern variables such as pattern density and pattern shapes between line and area. And systematic exploration regarding pitch effects on remaining nitride thickness in STI (Shallow Trench Isolation) CMP was performed with comparing PETEOS (Plasma Enhanced Tetra Ethyl Ortho Silicate) and HDP (High Density Plasma) oxide. Both measured remaining nitride thickness and expected oxide pattern density from consideration of deposition profile effects showed a good correlation with respect to pitch variation for a constant layout pattern density.