The mechanism of microwave guiding and plasma generation is investigated in a circular waveguide with a subcutoff dimension using pulsed microwaves of 3GHz. During the initial phase, gaseous breakdown is induced by the exponentially decaying wave. Upon breakdown, the refractive index of the plasma medium varies radially, with the plasma density reaching close to cutoff values in the central region. At lower pressures, the waves can propagate through the peripheral plasma with a reduced wavelength, due to the collisionally broadened upper hybrid resonance region. The intense narrow cross sectional plasma bears promise for multielemental focused ion beams.

A compact microwave driven plasma ion source for focused ion beam applications has been developed. Several gas species have been experimented including argon, krypton, and hydrogen. The plasma, confined by a minimum B multicusp magnetic field, has good radial and axial uniformity. The octupole multicusp configuration shows a superior performance in terms of plasma density (~1.3 x 10(11) cm(-3)) and electron temperature (7-15 eV) at a power density of 5-10 Wcm(2). Ion current densities ranging from a few hundreds to over 1000 mA/cm(2) have been obtained with different plasma electrode apertures. The ion source will be combined with electrostatic Einzel lenses and should be capable of producing multielemental focused ion beams for nanostructuring and implantations. The initial simulation results for the focused beams have been presented.

The axial ion energy spread near a plasma meniscus for multielement focused ion beams is investigated experimentally in atomic and molecular gaseous plasmas of krypton, argon, and hydrogen by tailoring the magnetic field in the region. In the case of magnetic end plugging, the ion energy spread reduces by ∼50% near the meniscus as compared to the bulk plasma, thereby facilitating beam focusing. A quadrupole filter can be used to control the mean energy of the ions. Comparison with standard Maxwellian and Druyvesteyn distributions with the same mean energy indicates that the ion energy distribution in the meniscus is deficient in the population of low and high energy tail ions, resulting in a Gaussian-like profile with a spread of ∼4 and ∼5 eV for krypton and argon ions, respectively. By carefully tuning the wave power, plasma collisionality, and the magnetic field in the meniscus, the spread can be made lower than that of liquid metal ion sources, for extracting focused ion beams of other elements with adequate current density, for research and applications in nanosystems

An earlier study of the axial ion energy distribution in the extraction region (plasma meniscus) of a compact microwave plasma ion source showed that the axial ion energy spread near the meniscus is small (∼5 eV) and comparable to that of a liquid metal ion source, making it a promising candidate for focused ion beam (FIB) applications [J. V. Mathew and S. Bhattacharjee, J. Appl. Phys. 105, 96101 (2009)]. In the present work we have investigated the radial ion energy distribution (IED) under the influence of beam extraction. Initially a single Einzel lens system has been used for beam extraction with potentials up to −6 kV for obtaining parallel beams. In situ measurements of IED with extraction voltages upto −5 kV indicates that beam extraction has a weak influence on the energy spread (±0.5 eV) which is of significance from the point of view of FIB applications. It is found that by reducing the geometrical acceptance angle at the ion energy analyzer probe, close to unidirectional distribution can be obtained with a spread that is smaller by at least 1 eV.

Electrostatic beam optics for a multi-element focused ion beam (MEFIB) system comprising of a microwave multicusp plasma (ion) source is designed with the help of two widely known and commercially available beam simulation codes: AXCEL-INP and SIMION. The input parameters to the simulations are obtained from experiments carried out in the system. A single and a double Einzel lens system (ELS) with and without beam limiting apertures (S) have been investigated. For a 1 mm beam at the plasma electrode aperture, the rms emittance of the focused ion beam is found to reduce from ∼0.9 mm mrad for single ELS to ∼0.5 mm mrad for a double ELS, when S of 0.5 mm aperture size is employed. The emittance can be further improved to ∼0.1 mm mrad by maintaining S at ground potential, leading to reduction in beam spot size (∼10 μm). The double ELS design is optimized for different electrode geometrical parameters with tolerances of ±1 mm in electrode thickness, electrode aperture, inter electrode distance, and ±1° in electrode angle, providing a robust design. Experimental results obtained with the double ELS for the focused beam current and spot size, agree reasonably well with the simulations.