Large out-of-plane displacements can be achieved when compliant mechanisms are utilized in MEMS. While mathematical and macroscopic modeling is helpful in building original designs, the actual MEMS device motion needs to be characterized in terms of the forces and displacements. A nanoindentation apparatus equipped with Berkovich diamond tip was used in an attempt to actuate and characterize the motion of the Bistable Spherical Compliant Micromechanism with a nonlinear (approximately cubic) mechanical response. Based on the obtained lateral force-displacement data it was concluded that the Berkovich diamond tip was too sharp, thus cutting through the polysilicon material of the MEMS device.