It was found in a Cu-CMP process using EP-C 5001 slurry and IC 1000 pad that Cu removal rate, being extremely low without H2O2 in the slurry, increases up to a maximum with the addition of H2O2, and then decreases again. Analysis of polarization curves and Eh-pH diagrams shows that without H2O2 Cu has the lowest electric potential, as a result, the highest thermodynamic stability in the Cu/slurry system. Addition of H2O2 shifts the potential up and induces the formation of Cu2O, resulting in a high removal rate. At high H2O2 concentration, a CuO passivation film is formed. In this case, only mechanical removal of the passivating oxide film allows the process to proceed. It is speculated that the moving pad surface adheres the oxidized species via the formation of hydrogen bonds with oxygen atoms of copper oxide molecules, thus detaching them from the wafer surface. Each oxygen atom is capable of pulling out two Cu atoms if Cu2O is formed on the surface and only one Cu atom if CuO is formed. This would explain why the removal rate is high at low H2O2 concentration and low at high H2O2 concentration.
In 2015, Bowers et al. (2018, https://doi.org/10.1029/2017JD027771) detected a terrestrial gamma ray flash (TGF) in Hurricane Patricia from an aircraft flying at 2.6 km through what they argued to be a beam of downward gamma radiation produced by the positron component of the TGF. This paper uses the energy spectrum for gamma rays produced by the positrons of a relativistic runaway electron avalanche as simulated by the REAM code, propagated through a model of the Earth's atmosphere in Geant4, to examine the feasibility of detecting a typical upward TGF through its reverse positron beam at various altitudes on the ground. We find that, with patience, modest‐sized scintillators on mountains as low as 1 km should be able to observe the same TGFs seen from spacecraft.
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