The hybrid thin film comprising ZnO and TiO2 nanoparticles deposited on single‐walled carbon nanotube (SWCNT) was prepared by sol–gel process on aluminum‐coated silicon wafer. The spin‐coated films were further processed by heat treatment followed by hydrothermal process. The synthesized materials were characterized by X‐ray diffraction (XRD), field emission scanning electron microscopy (FE‐SEM), and photoluminescence spectroscopy for band‐gap determination. The coated ZnO formed the nanodisk morphology on the surface of carbon nanotubes with TiO2 nanoparticles incorporated on Al/Si wafer. The FE‐SEM analysis before and after hydrothermal treatment with ZnO–TiO2–SWCNT/Al/Si was conducted. The surface properties of the prepared thin films were analyzed for Zn2p, Ti2p, C1s, and O1s of individual spectra by X‐ray photoelectron spectroscopy (XPS) analysis. Good reproducibility and quick response time were obtained for ultraviolet (UV) light‐sensing activity with ZnO/SWCNT and ZnO–TiO2/SWCNT nanocomposites exhibiting good hydrogen gas sensing activity.
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