One of the key challenges in nanotechnology is to control a self‐assembling system to create a specific structure. Self‐organizing block copolymers offer a rich variety of periodic nanoscale patterns, and researchers have succeeded in finding conditions that lead to very long range order of the domains. However, the array of microdomains typically still contains some uncontrolled defects and lacks global registration and orientation. Recent efforts in templated self‐assembly of block copolymers have demonstrated a promising route to control bottom‐up self‐organization processes through top‐down lithographic templates. The orientation and placement of block‐copolymer domains can be directed by topographically or chemically patterned templates. This templated self‐assembly method provides a path towards the rational design of hierarchical device structures with periodic features that cover several length scales.

Self-assembling materials are the building blocks for bottom-up nanofabrication processes, but many self-assembled nanostructures contain defects and lack sufficient long-range order for certain nanotechnology applications. Here we investigate the formation of defects in a self-assembled array of spherical block-copolymer microdomains, using topographical templates to control the local self-assembly. Perfect ordered sphere arrays can form in both constant-width templates and width-modulated templates. For modulated templates, transition between configurations having a constant number of rows and configurations of stable arrays with varying numbers of rows is shown to be analogous to dislocation formation in an epitaxial thin film system. Based on the configuration transition energy and fluctuation energy, designed templates with a high tolerance for lithographical imperfections can direct precisely modulated block-copolymer nanostructures. This study provides insights into the design of hybrid systems combining top-down and bottom-up fabrication.

Single‐domain cobalt dot arrayswith high magnetic particle density, patterned over large areas (e.g., 10 cm diameter wafers) are fabricated by self‐assembled block copolymer lithography, using a polystyrene–poly(ferrocenyldimethylsilane) copolymer as a template. By varying the copolymer type and etching conditions the magnetic properties can be tuned. The Figure shows a typical array of Co dots with tungsten caps obtained via this procedure.

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