Dielectrophoretic (DEP) phenomena have been explored to great success for various applications like particle sorting and separation. To elucidate the underlying mechanism and quantify the DEP force experienced by particles, the point-dipole and Maxwell Stress Tensor (MST) methods are commonly used. However, both methods exhibit their own limitations. For example, the point-dipole method is unable to fully capture the essence of particle-particle interactions and the MST method is not suitable for particles of non-homogeneous property. Moreover, both methods fare poorly when it comes to explaining DEP phenomena such as the dependence of crossover frequency on medium conductivity. To address these limitations, the authors have developed a new method, termed volumetric-integration method, with the aid of computational implementation, to reexamine the DEP phenomena, elucidate the governing mechanism, and quantify the DEP force. The effect of an electric double layer (EDL) on particles' crossover behavior is dealt with through consideration of the EDL structure along with surface ionic/molecular adsorption, unlike in other methods, where the EDL is accounted for through simply assigning a surface conductance value to the particles. For validation, by comparing with literature experimental data, the authors show that the new method can quantify the DEP force on not only homogeneous particles but also non-homogeneous ones, and predict particle-particle interactions fairly accurately. Moreover, the authors also show that the predicted dependence of crossover frequency on medium conductivity and particle size agrees very well with experimental measurements.

Particle-particle interaction plays a crucial role in determining the movement and alignment of particles under dielectrophoresis (DEP). Previous research efforts focus on studying the mechanism governing the alignment of spherical particles with similar sizes in a static condition. Different approaches have been developed to simulate the alignment process of a given number of particles from several up to thousands depending on the applicability of the approaches. However, restricted by the simplification of electric field distribution and use of identical spherical particles, not much new understanding has been gained apart from the most common phenomenon of pearl chain formation. To enhance the understanding of particle-particle interaction, the movement of pearl chains under DEP in a flow condition was studied and a new type of tumbling motion with unknown mechanism was observed. For interactions among non-spherical particles, some preceding works have been done to simulate the alignment of ellipsoidal particles. Yet the modeling results do not match experimental observations. In this paper, the authors applied the newly developed volumetric polarization and integration (VPI) method to elucidate the underlying mechanism for the newly observed movement of pearl chains under DEP in a flow condition and explain the alignment patterns of ellipsoidal particles. The modeling results show satisfactory agreement with experimental observations, which proves the strength of the VPI method in explaining complicated DEP phenomena.

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The experimental ionized physical vapor deposition (IPVD) system with an external antenna is described, and experimental characterization of the plasma was performed: plasma density was up to 5 × 1012 cm−3, the argon ionization ratio was ∼0.2–0.4%, and copper ionization ratio was ∼28% in bulk plasma, corresponding to ionized Cu+ flux ratio in range the 73–95%. To aid further development and IPVD technology extendibility to the future nanoscale fabrication, the 2D plasma fluid model for IPVD system was developed. The model comprised the Cu + Ar collisional mechanism including charge exchange and Penning ionization, considering gas rarefaction effect, variable ion mobility approach, and analytical approach in description of the thermalization of sputtered Cu. The simulation results were validated through experimental measurements of the plasma characteristics by electrical probe and provided reasonable results in 2 to 15 Pa pressure range. The implementation of the model for optimized design of scaled‐up IPVD system was demonstrated.

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