No abstract

In modern Industry 4.0 era, status monitoring of machine tools is an important target and vibration monitoring is a commonly used way for machine tools life assessment. However, the vibration characteristics of machine tools are usually complicated and cover a very wide spectrum. Any accelerometers will suffer from its sensitivity-bandwidth limitation and high cost. As a result, an integrated vibration sensing module is proposed here by integrating various MEMS accelerometer chips. Through structure and circuit design, the vibration sensing module is integrated as well as the disadvantage, low sensitivity, of MEMS accelerometer is overcome. Furthermore, the module is then compared to a piezoelectric accelerometer as the standard for accessing the performance. Additionally, the vibration domain knowledge is also investigated and also applied to the machine tools for examining its feasibility. In the future, with more domain knowledge, it is expected that more sophisticated model would be developed for better predicting the machine status for enhancing the manufacturing reliability.